Publication:
Process and properties of ALD tungsten nitride carbide barrier films for interconnects
Date
Loading...
Files
Journal
Abstract
Description
Metrics
Views
1966 since deposited on 2021-10-15
2last month
2last week
Acq. date: 2026-01-09
Citations
Metrics
Views
1966 since deposited on 2021-10-15
2last month
2last week
Acq. date: 2026-01-09
Citations