New trends in the application of scanning probe techniques in failure analysis
| dc.contributor.author | Schweinbock, T. | |
| dc.contributor.author | Schömann, S. | |
| dc.contributor.author | Alvarez, David | |
| dc.contributor.author | Buzzo, M. | |
| dc.contributor.author | Frammelsberger, W. | |
| dc.contributor.author | Breitschopf, P. | |
| dc.contributor.author | Benstetter, G. | |
| dc.date.accessioned | 2021-10-15T16:08:28Z | |
| dc.date.available | 2021-10-15T16:08:28Z | |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/9576 | |
| dc.source | IIOimport | |
| dc.title | New trends in the application of scanning probe techniques in failure analysis | |
| dc.type | Journal article | |
| dc.source.peerreview | no | |
| dc.source.beginpage | 1541 | |
| dc.source.endpage | 1546 | |
| dc.source.journal | Microelectronics Reliability | |
| dc.source.issue | 9_11 | |
| dc.source.volume | 44 | |
| imec.availability | Published - imec |
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