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Integration of SPER and FUSI in a pFET

dc.contributor.authorSeveri, Simone
dc.contributor.authorPawlak, Bartek
dc.contributor.authorVeloso, Anabela
dc.contributor.authorDuffy, Ray
dc.contributor.authorKottantharayil, Anil
dc.contributor.authorLauwers, Anne
dc.contributor.authorHenson, Kirklen
dc.contributor.authorde Marneffe, Jean-Francois
dc.contributor.authorEyben, Pierre
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorDe Meyer, Kristin
dc.contributor.authorJurczak, Gosia
dc.contributor.authorBiesemans, Serge
dc.date.accessioned2021-10-15T16:10:44Z
dc.date.available2021-10-15T16:10:44Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9583
dc.sourceIIOimport
dc.titleIntegration of SPER and FUSI in a pFET
dc.typeOral presentation
dc.contributor.imecauthorSeveri, Simone
dc.contributor.imecauthorPawlak, Bartek
dc.contributor.imecauthorVeloso, Anabela
dc.contributor.imecauthorLauwers, Anne
dc.contributor.imecauthorde Marneffe, Jean-Francois
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorDe Meyer, Kristin
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.imecauthorBiesemans, Serge
dc.source.peerreviewno
dc.source.conferenceco-partners workshop
dc.source.conferencedate1/10/2004
dc.source.conferencelocationLeuven Belgium
imec.availabilityPublished - imec


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