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Integration challenges of SPER junctions for the 45 nm technology node
Publication:
Integration challenges of SPER junctions for the 45 nm technology node
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Date
2004
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Severi, Simone
;
Richard, Lindsay
;
Henson, Kirklen
;
Pawlak, Bartek
;
Satta, Alessandra
;
Duffy, Ray
;
Surdeanu, Radu
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1941
since deposited on 2021-10-15
Acq. date: 2025-12-10
Citations
Metrics
Views
1941
since deposited on 2021-10-15
Acq. date: 2025-12-10
Citations