Integration challenges of SPER junctions for the 45 nm technology node

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Authors
Severi, Simone; Richard, Lindsay; Henson, Kirklen; Pawlak, Bartek; Satta, Alessandra; Duffy, Ray; Surdeanu, Radu
Conference
Varian Worshop
Title
Integration challenges of SPER junctions for the 45 nm technology node
Publication type
Oral presentation
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