Show simple item record

Secondary ion mass spectrometry: a tool for surface and in-depth analysis

dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-09-29T13:20:56Z
dc.date.available2021-09-29T13:20:56Z
dc.date.issued1995
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/960
dc.sourceIIOimport
dc.titleSecondary ion mass spectrometry: a tool for surface and in-depth analysis
dc.typeProceedings paper
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage252
dc.source.conferenceALTECH 95: Analytical Techniques for Semiconductor Materials and Process Characterization II. Proceedings of the Satellite Sympo
dc.source.conferencedate28/09/1995
dc.source.conferencelocationDen Haag The Netherlands
imec.availabilityPublished - open access
imec.internalnotesElectrochemical Society Proceedings; Vol. 95-30


Files in this item

Thumbnail
Name:
938.pdf
Size:
88.90Kb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record