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Anistropic etching of silicon using KOH: fast etching planes revisited

dc.contributor.authorSterken, Tom
dc.contributor.authorBorghs, Gustaaf
dc.contributor.authorPuers, Bob
dc.date.accessioned2021-10-15T16:25:16Z
dc.date.available2021-10-15T16:25:16Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9633
dc.sourceIIOimport
dc.titleAnistropic etching of silicon using KOH: fast etching planes revisited
dc.typeProceedings paper
dc.contributor.imecauthorSterken, Tom
dc.contributor.imecauthorBorghs, Gustaaf
dc.contributor.imecauthorPuers, Bob
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage119
dc.source.endpage122
dc.source.conferenceProceedings 15th MicroMechanics Workshop - MME
dc.source.conferencedate5/09/2004
dc.source.conferencelocationLeuven Belgium
imec.availabilityPublished - open access


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