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Novel design and fabrication of a MEMS electrostatic vibration scavenger

dc.contributor.authorSterken, Tom
dc.contributor.authorFiorini, Paolo
dc.contributor.authorBaert, Kris
dc.contributor.authorBorghs, Gustaaf
dc.contributor.authorPuers, Bob
dc.date.accessioned2021-10-15T16:25:34Z
dc.date.available2021-10-15T16:25:34Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9634
dc.sourceIIOimport
dc.titleNovel design and fabrication of a MEMS electrostatic vibration scavenger
dc.typeProceedings paper
dc.contributor.imecauthorSterken, Tom
dc.contributor.imecauthorBorghs, Gustaaf
dc.contributor.imecauthorPuers, Bob
dc.source.peerreviewno
dc.source.beginpage18
dc.source.endpage21
dc.source.conferenceThe 4th Int. Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications - PowerMEMS
dc.source.conferencedate28/11/2004
dc.source.conferencelocationKyoto Japan
imec.availabilityPublished - imec


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