Authors

Vandervorst, Wilfried; Clarysse, Trudo; De Wolf, Peter; Hellemans, L.; Snauwaert, J.; Privitera, Vittorio; Raineri, Vito

Conference

3rd Int. Workshop on the Measurement and Characterizaton of Ultra-Shallow Dopant Profiles in Semiconductors

Title

On the determination of two-dimensional carrier distributions

Publication type

Proceedings paper

Embargo date

9999-12-31