Authors

Vandervorst, Wilfried; De Wolf, Peter; Clarysse, Trudo; Trenkler, Thomas; Hellemans, L.; Snauwaerts, Jan; Raineri, Vito

Conference

International Workshop on Semiconductor Characterization: Present Status and Needs; January 1995; Gaithersburg, USA.

Title

Carrier Profile Determination in Device Structures using AFM-Based Methods

Publication type

Oral presentation

Embargo date

9999-12-31