dc.contributor.author | Tilmans, Harrie | |
dc.contributor.author | De Raedt, Walter | |
dc.contributor.author | Beyne, Eric | |
dc.date.accessioned | 2021-10-15T16:39:20Z | |
dc.date.available | 2021-10-15T16:39:20Z | |
dc.date.issued | 2004 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/9679 | |
dc.source | IIOimport | |
dc.title | Materials and technology for RF-MEMS | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Tilmans, Harrie | |
dc.contributor.imecauthor | De Raedt, Walter | |
dc.contributor.imecauthor | Beyne, Eric | |
dc.contributor.orcidimec | Tilmans, Harrie::0000-0003-4240-4962 | |
dc.contributor.orcidimec | De Raedt, Walter::0000-0002-7117-7976 | |
dc.contributor.orcidimec | Beyne, Eric::0000-0002-3096-050X | |
dc.source.peerreview | no | |
dc.source.beginpage | 76 | |
dc.source.endpage | 89 | |
dc.source.conference | Proceedings of the 5th International Symposium on MEMS and Nanotechnology | |
dc.source.conferencedate | 7/06/2004 | |
dc.source.conferencelocation | Costa Mesa, CA USA | |
imec.availability | Published - imec | |