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In-situ HVEM study of dislocation generation in patterned stress fields at silicon surfaces

dc.contributor.authorVanhellemont, Jan
dc.contributor.authorClaeys, Cor
dc.contributor.authorVan Landuyt, J.
dc.date.accessioned2021-09-29T13:21:48Z
dc.date.available2021-09-29T13:21:48Z
dc.date.issued1995
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/970
dc.sourceIIOimport
dc.titleIn-situ HVEM study of dislocation generation in patterned stress fields at silicon surfaces
dc.typeJournal article
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage497
dc.source.endpage506
dc.source.journalPhysica Status Solidi A
dc.source.issue1
dc.source.volume150
imec.availabilityPublished - open access


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