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In-situ HVEM study of dislocation generation in patterned stress fields at silicon surfaces
Publication:
In-situ HVEM study of dislocation generation in patterned stress fields at silicon surfaces
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Date
1995
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vanhellemont, Jan
;
Claeys, Cor
;
Van Landuyt, J.
Journal
Physica Status Solidi A
Abstract
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2042
since deposited on 2021-09-29
Acq. date: 2026-01-06
Citations
Metrics
Views
2042
since deposited on 2021-09-29
Acq. date: 2026-01-06
Citations