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In-situ HVEM study of dislocation generation in patterned stress fields at silicon surfaces

Date

1995
Journal article
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dc.contributor.authorVanhellemont, Jan
dc.contributor.authorClaeys, Cor
dc.contributor.authorVan Landuyt, J.
dc.date.accessioned2021-09-29T13:21:48Z
dc.date.available2021-09-29T13:21:48Z
dc.date.embargo9999-12-31
dc.date.issued1995
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/970
dc.source.beginpage497
dc.source.endpage506
dc.source.issue1
dc.source.journalPhysica Status Solidi A
dc.source.volume150
dc.title

In-situ HVEM study of dislocation generation in patterned stress fields at silicon surfaces

dc.typeJournal article
dspace.entity.typePublication
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