Authors

Vanhellemont, Jan; Janssens, Koenraad; Frabboni, S.; Balboni, R.; Armigliato, A.

Conference

ALTECH 95: Analytical Techniques for Semiconductor Materials and Process Characterization II. Proceedings of the Satellite Sympo

Title

Electron microscopy techniques for the assessment of localised stress distributions in semiconductors

Publication type

Proceedings paper

Embargo date

9999-12-31