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Effects of alloying on properties of NiSi for CMOS applications

dc.contributor.authorVan Dal, Mark
dc.contributor.authorAkheyar, Amal
dc.contributor.authorKittl, Jorge
dc.contributor.authorChamirian, Oxana
dc.contributor.authorde Potter de ten Broeck, Muriel
dc.contributor.authorDemeurisse, Caroline
dc.contributor.authorLauwers, Anne
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-15T16:51:52Z
dc.date.available2021-10-15T16:51:52Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9719
dc.sourceIIOimport
dc.titleEffects of alloying on properties of NiSi for CMOS applications
dc.typeProceedings paper
dc.contributor.imecauthorVan Dal, Mark
dc.contributor.imecauthorde Potter de ten Broeck, Muriel
dc.contributor.imecauthorDemeurisse, Caroline
dc.contributor.imecauthorLauwers, Anne
dc.contributor.imecauthorMaex, Karen
dc.source.peerreviewno
dc.source.conferenceSilicon Front-End Junction Formation - Physics and technology
dc.source.conferencedate12/04/2004
dc.source.conferencelocationWarrendale, PA USA
imec.availabilityPublished - imec
imec.internalnotesMaterials Research Society Symposium Proceedings; Vol. 810


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