Show simple item record

The relation between phase formation and onset of thermal degradation in nano-scale CoSi2-polycrystalline silicon structures

dc.contributor.authorVan Dal, Mark
dc.contributor.authorJawarani, D.
dc.contributor.authorvan Berkum, J.G.M.
dc.contributor.authorKaiser, M.
dc.contributor.authorKittl, Jorge
dc.contributor.authorVrancken, Christa
dc.contributor.authorde Potter de ten Broeck, Muriel
dc.contributor.authorLauwers, Anne
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-15T16:52:13Z
dc.date.available2021-10-15T16:52:13Z
dc.date.issued2004-12
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9720
dc.sourceIIOimport
dc.titleThe relation between phase formation and onset of thermal degradation in nano-scale CoSi2-polycrystalline silicon structures
dc.typeJournal article
dc.contributor.imecauthorVan Dal, Mark
dc.contributor.imecauthorVrancken, Christa
dc.contributor.imecauthorde Potter de ten Broeck, Muriel
dc.contributor.imecauthorLauwers, Anne
dc.contributor.imecauthorMaex, Karen
dc.source.peerreviewno
dc.source.beginpage7568
dc.source.endpage7573
dc.source.journalJournal of Applied Physics
dc.source.issue12
dc.source.volume96
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record