Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Articles
The relation between phase formation and onset of thermal degradation in nano-scale CoSi2-polycrystalline silicon structures
Publication:
The relation between phase formation and onset of thermal degradation in nano-scale CoSi2-polycrystalline silicon structures
Copy permalink
Date
2004-12
Journal article
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Van Dal, Mark
;
Jawarani, D.
;
van Berkum, J.G.M.
;
Kaiser, M.
;
Kittl, Jorge
;
Vrancken, Christa
;
de Potter de ten Broeck, Muriel
;
Lauwers, Anne
;
Maex, Karen
Journal
Journal of Applied Physics
Abstract
Description
Metrics
Views
1918
since deposited on 2021-10-15
5
last month
2
last week
Acq. date: 2025-12-09
Citations
Metrics
Views
1918
since deposited on 2021-10-15
5
last month
2
last week
Acq. date: 2025-12-09
Citations