Authors

Van Dal, Mark; Jawarani, D.; van Berkum, J.G.M.; Kaiser, M.; Kittl, Jorge; Vrancken, Christa; de Potter de ten Broeck, Muriel; Lauwers, Anne; Maex, Karen

Issue

12

Journal

Journal of Applied Physics

Volume

96

Title

The relation between phase formation and onset of thermal degradation in nano-scale CoSi2-polycrystalline silicon structures

Publication type

Journal article