Publication:
The relation between phase formation and onset of thermal degradation in nano-scale CoSi2-polycrystalline silicon structures
Date
| dc.contributor.author | Van Dal, Mark | |
| dc.contributor.author | Jawarani, D. | |
| dc.contributor.author | van Berkum, J.G.M. | |
| dc.contributor.author | Kaiser, M. | |
| dc.contributor.author | Kittl, Jorge | |
| dc.contributor.author | Vrancken, Christa | |
| dc.contributor.author | de Potter de ten Broeck, Muriel | |
| dc.contributor.author | Lauwers, Anne | |
| dc.contributor.author | Maex, Karen | |
| dc.contributor.imecauthor | Van Dal, Mark | |
| dc.contributor.imecauthor | Vrancken, Christa | |
| dc.contributor.imecauthor | de Potter de ten Broeck, Muriel | |
| dc.contributor.imecauthor | Lauwers, Anne | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.date.accessioned | 2021-10-15T16:52:13Z | |
| dc.date.available | 2021-10-15T16:52:13Z | |
| dc.date.issued | 2004-12 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/9720 | |
| dc.source.beginpage | 7568 | |
| dc.source.endpage | 7573 | |
| dc.source.issue | 12 | |
| dc.source.journal | Journal of Applied Physics | |
| dc.source.volume | 96 | |
| dc.title | The relation between phase formation and onset of thermal degradation in nano-scale CoSi2-polycrystalline silicon structures | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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