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The relation between phase formation and onset of thermal degradation in nano-scale CoSi2-polycrystalline silicon structures
Publication:
The relation between phase formation and onset of thermal degradation in nano-scale CoSi2-polycrystalline silicon structures
Date
2004-12
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Van Dal, Mark
;
Jawarani, D.
;
van Berkum, J.G.M.
;
Kaiser, M.
;
Kittl, Jorge
;
Vrancken, Christa
;
de Potter de ten Broeck, Muriel
;
Lauwers, Anne
;
Maex, Karen
Journal
Journal of Applied Physics
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1910
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations
Metrics
Views
1910
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations