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Deposition of HfO2 on germanium and the impact of surface pretreatments

dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorBrijs, Bert
dc.contributor.authorCaymax, Matty
dc.contributor.authorConard, Thierry
dc.contributor.authorChiarella, Thomas
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorDe Jaeger, Brice
dc.contributor.authorKubicek, Stefan
dc.contributor.authorMeuris, Marc
dc.contributor.authorOnsia, Bart
dc.contributor.authorRichard, Olivier
dc.contributor.authorTeerlinck, Ivo
dc.contributor.authorVan Steenbergen, Jan
dc.contributor.authorZhao, Chao
dc.contributor.authorHeyns, Marc
dc.date.accessioned2021-10-15T16:59:06Z
dc.date.available2021-10-15T16:59:06Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9742
dc.sourceIIOimport
dc.titleDeposition of HfO2 on germanium and the impact of surface pretreatments
dc.typeJournal article
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorChiarella, Thomas
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorDe Jaeger, Brice
dc.contributor.imecauthorKubicek, Stefan
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorOnsia, Bart
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorVan Steenbergen, Jan
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecChiarella, Thomas::0000-0002-6155-9030
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimecDe Jaeger, Brice::0000-0001-8804-7556
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.source.peerreviewno
dc.source.beginpage3824
dc.source.endpage3826
dc.source.journalApplied Physics Letters
dc.source.issue17
dc.source.volume85
imec.availabilityPublished - imec


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