Deposition of HfO2 on germanium and the impact of surface pretreatments

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Author(s)

Van Elshocht, Sven

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Conard, Thierry

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Chiarella, Thomas

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De Gendt, Stefan

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De Jaeger, Brice

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Kubicek, Stefan

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Richard, Olivier

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Van Steenbergen, Jan

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Journal

Applied Physics Letters

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1955 since deposited on 2021-10-15

Acq. date: 2025-10-23