Deposition of HfO2 on germanium and the impact of surface pretreatments

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Authors

Van Elshocht, Sven; Brijs, Bert; Caymax, Matty; Conard, Thierry; Chiarella, Thomas; De Gendt, Stefan; De Jaeger, Brice; Kubicek, Stefan; Meuris, Marc; Onsia, Bart; Richard, Olivier; Teerlinck, Ivo; Van Steenbergen, Jan; Zhao, Chao; Heyns, Marc

Issue

17

Journal

Applied Physics Letters

Volume

85

Title

Deposition of HfO2 on germanium and the impact of surface pretreatments

Publication type

Journal article

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