Publication:

Deposition of HfO2 on germanium and the impact of surface pretreatments

Date

2004

Journal article

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Author(s)

Van Elshocht, Sven

;

;

;

Conard, Thierry

;

Chiarella, Thomas

;

De Gendt, Stefan

;

De Jaeger, Brice

;

Kubicek, Stefan

;

;

;

Richard, Olivier

;

;

Van Steenbergen, Jan

;

;

Journal

Applied Physics Letters

Statistics

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Acq. date: 2026-08-07