Surface preparation techniques for high-k deposition on Ge substrates

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Authors
Van Elshocht, Sven; Delabie, Annelies; Brijs, Bert; Caymax, Matty; Conard, Thierry; Onsia, Bart; Puurunen, Riikka; Richard, Olivier; Van Steenbergen, Jan; Zhao, Chao; Meuris, Marc; Heyns, Marc
Conference
7th International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS
Title
Surface preparation techniques for high-k deposition on Ge substrates
Publication type
Oral presentation
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