Publication:

Surface preparation techniques for high-k deposition on Ge substrates

Date

2004

Presentation

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Author(s)

Van Elshocht, Sven

;

Delabie, Annelies

;

;

;

Conard, Thierry

;

;

Puurunen, Riikka

;

Richard, Olivier

;

Van Steenbergen, Jan

;

;

;

Statistics

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Acq. date: 2026-06-07