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Synthesis, deposition and crystallization of an aqueous Pb(Zr0.3Ti0.7)O3 precursor solution for ferroelectric thin films

dc.contributor.authorVan Genechten, Dirk
dc.contributor.authorVanhoyland, G.
dc.contributor.authorVan Bael, Marlies
dc.contributor.authorVan den Rul, Heidi
dc.contributor.authorMullens, J.
dc.contributor.authorVan Poucke, L.C.
dc.contributor.authorD'Haen, Jan
dc.contributor.authorWouters, Dirk
dc.date.accessioned2021-10-15T17:01:36Z
dc.date.available2021-10-15T17:01:36Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9749
dc.sourceIIOimport
dc.titleSynthesis, deposition and crystallization of an aqueous Pb(Zr0.3Ti0.7)O3 precursor solution for ferroelectric thin films
dc.typeOral presentation
dc.contributor.imecauthorVan Bael, Marlies
dc.contributor.imecauthorD'Haen, Jan
dc.contributor.orcidimecVan Bael, Marlies::0000-0002-5516-7962
dc.source.peerreviewno
dc.source.conferenceE-MRS Spring Meeting Symposium D: Functional Oxides for Advanced Semiconductor Technologies
dc.source.conferencedate24/05/2004
dc.source.conferencelocationStrasbourg France
imec.availabilityPublished - imec


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