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RF MEMS reliability - The challenge, the physics, and the reward

dc.contributor.authorvan Spengen, Merlijn
dc.date.accessioned2021-10-15T17:14:30Z
dc.date.available2021-10-15T17:14:30Z
dc.date.issued2004-09
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9792
dc.sourceIIOimport
dc.titleRF MEMS reliability - The challenge, the physics, and the reward
dc.typeProceedings paper
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage319
dc.source.endpage325
dc.source.conference15th Micromechanics Workshop - MME
dc.source.conferencedate5/09/2004
dc.source.conferencelocationLeuven Belgium
imec.availabilityPublished - open access


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