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Optical methods for the reliability and failure analysis of RF MEMS

dc.contributor.authorvan Spengen, Merlijn
dc.contributor.authorDe Wolf, Ingrid
dc.date.accessioned2021-10-15T17:14:47Z
dc.date.available2021-10-15T17:14:47Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9793
dc.sourceIIOimport
dc.titleOptical methods for the reliability and failure analysis of RF MEMS
dc.typeProceedings paper
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewyes
dc.source.conferenceISMA Conference on Noise and Vibration Engineering
dc.source.conferencedate20/09/2004
dc.source.conferencelocationLeuven Belgium
imec.availabilityPublished - imec
imec.internalnotesCD-ROM proceedings


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