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Characterization and failure analysis of MEMS: high resolution optical investigation of small out-of-plane movements and fast vibrations

dc.contributor.authorvan Spengen, Merlijn
dc.contributor.authorPuers, Bob
dc.contributor.authorMertens, Robert
dc.contributor.authorDe Wolf, Ingrid
dc.date.accessioned2021-10-15T17:15:08Z
dc.date.available2021-10-15T17:15:08Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9794
dc.sourceIIOimport
dc.titleCharacterization and failure analysis of MEMS: high resolution optical investigation of small out-of-plane movements and fast vibrations
dc.typeJournal article
dc.contributor.imecauthorPuers, Bob
dc.contributor.imecauthorMertens, Robert
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewno
dc.source.beginpage89
dc.source.endpage96
dc.source.journalMicrosystems Technologies
dc.source.issue2
dc.source.volume10
imec.availabilityPublished - imec


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