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Requirements on CD and Overlay for 200GHz QSA SiGe:C HBT's

dc.contributor.authorVan Wichelen, Koen
dc.contributor.authorWitters, Liesbeth
dc.contributor.authorVan Huylenbroeck, Stefaan
dc.contributor.authorLeray, Philippe
dc.contributor.authorLaidler, David
dc.contributor.authorKunnen, Eddy
dc.contributor.authorDecoutere, Stefaan
dc.date.accessioned2021-10-15T17:18:19Z
dc.date.available2021-10-15T17:18:19Z
dc.date.issued2004-09
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9804
dc.sourceIIOimport
dc.titleRequirements on CD and Overlay for 200GHz QSA SiGe:C HBT's
dc.typeProceedings paper
dc.contributor.imecauthorWitters, Liesbeth
dc.contributor.imecauthorVan Huylenbroeck, Stefaan
dc.contributor.imecauthorLeray, Philippe
dc.contributor.imecauthorLaidler, David
dc.contributor.imecauthorDecoutere, Stefaan
dc.contributor.orcidimecVan Huylenbroeck, Stefaan::0000-0001-9978-3575
dc.contributor.orcidimecLaidler, David::0000-0003-4055-3366
dc.contributor.orcidimecDecoutere, Stefaan::0000-0001-6632-6239
dc.source.peerreviewno
dc.source.beginpage333
dc.source.endpage336
dc.source.conferenceProceedings of the 34th European Solid-State Device Research Conference - ESSDERC
dc.source.conferencedate20/09/2004
dc.source.conferencelocationLeuven Belgium
imec.availabilityPublished - imec


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