Two-dimensional carrier profiling in advanced devices with pico-meter resolution

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Authors
Vandervorst, Wilfried; Alvarez, David; Eyben, Pierre; Fouchier, Marc; Hartwich, J.; Slesazech, S.; Verheyen, Peter; Hogg, S.
Conference
Proceedings Ultimate Integration of Silicon (ULIS) Workshop
Title
Two-dimensional carrier profiling in advanced devices with pico-meter resolution
Publication type
Proceedings paper
Embargo date
9999-12-31
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