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Surface characterization in microelectronics industry

dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorBender, Hugo
dc.date.accessioned2021-10-15T17:23:18Z
dc.date.available2021-10-15T17:23:18Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9820
dc.sourceIIOimport
dc.titleSurface characterization in microelectronics industry
dc.typeOral presentation
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorBender, Hugo
dc.source.peerreviewno
dc.source.conferenceMeeting Belgian Particle, Colloid & Interface Society - BEPCIS
dc.source.conferencedate27/05/2004
dc.source.conferencelocationBrussel Belgi�
imec.availabilityPublished - imec


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