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Sub-nanometer resolution dopant profiling in Si and Ge-based nanoscale devices

dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorEyben, Pierre
dc.contributor.authorAlvarez, David
dc.contributor.authorFouchier, Marc
dc.date.accessioned2021-10-15T17:23:55Z
dc.date.available2021-10-15T17:23:55Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9822
dc.sourceIIOimport
dc.titleSub-nanometer resolution dopant profiling in Si and Ge-based nanoscale devices
dc.typeOral presentation
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorEyben, Pierre
dc.source.peerreviewno
dc.source.conferenceMRS Fall Meeting Symposium O: Scanning-Probe and Other Novel Microscopies of Local Phenomena in Nanostructured Materials
dc.source.conferencedate29/11/2004
dc.source.conferencelocationBoston, MA USA
imec.availabilityPublished - imec


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