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Errors in near-surface and interfacial profiling of boron and arsenic

dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorJanssens, Tom
dc.contributor.authorBrijs, Bert
dc.contributor.authorConard, Thierry
dc.contributor.authorHuyghebaert, Cedric
dc.contributor.authorFruhauf, J.
dc.contributor.authorBergmaier, A.
dc.contributor.authorDollinger, G.
dc.contributor.authorBuyuklimanli, T.
dc.contributor.authorVanden Berg, J.A.
dc.contributor.authorKimura, K.
dc.date.accessioned2021-10-15T17:24:16Z
dc.date.available2021-10-15T17:24:16Z
dc.date.issued2004-06
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9823
dc.sourceIIOimport
dc.titleErrors in near-surface and interfacial profiling of boron and arsenic
dc.typeJournal article
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorHuyghebaert, Cedric
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecHuyghebaert, Cedric::0000-0001-6043-7130
dc.source.peerreviewno
dc.source.beginpage618
dc.source.endpage631
dc.source.journalApplied Surface Science
dc.source.volume231-232
imec.availabilityPublished - imec
imec.internalnotesPaper from the 14th Int. Conf. on Secondary Ion Mass Spectrometry and Related Topics; San Diego; Sept. 2003


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