Errors in near-surface and interfacial profiling of boron and arsenic

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Authors

Vandervorst, Wilfried; Janssens, Tom; Brijs, Bert; Conard, Thierry; Huyghebaert, Cedric; Fruhauf, J.; Bergmaier, A.; Dollinger, G.; Buyuklimanli, T.; Vanden Berg, J.A.; Kimura, K.

Journal

Applied Surface Science

Volume

231-232

Title

Errors in near-surface and interfacial profiling of boron and arsenic

Publication type

Journal article

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