Publication:

Errors in near-surface and interfacial profiling of boron and arsenic

Date

2004-06

Journal article

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Author(s)

Vandervorst, Wilfried

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;

;

Conard, Thierry

;

Huyghebaert, Cedric

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;

;

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Buyuklimanli, T.

;

Vanden Berg, J.A.

;

Journal

Applied Surface Science

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1954 since deposited on 2021-10-15

Acq. date: 2025-12-09