| dc.contributor.author | Vereecke, Guy | |
| dc.date.accessioned | 2021-10-15T17:34:58Z | |
| dc.date.available | 2021-10-15T17:34:58Z | |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/9856 | |
| dc.source | IIOimport | |
| dc.title | FEOL challenges for particle removal: the case of megasonic cleaning | |
| dc.type | Oral presentation | |
| dc.contributor.imecauthor | Vereecke, Guy | |
| dc.contributor.orcidimec | Vereecke, Guy::0000-0001-9058-9338 | |
| dc.source.peerreview | no | |
| dc.source.conference | Semicon | |
| dc.source.conferencedate | 21/04/2004 | |
| dc.source.conferencelocation | Munich Germany | |
| imec.availability | Published - imec | |
| imec.internalnotes | Invited presentation at the 'Contamination Control in the Front End of Advanced Production Lines' Technical Session | |
