Optimization of the ferroelectric film for application in scaled FeFET

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Authors
Viapiana, Matteo; Xu, Zhen; Goux, Ludovic; Kaczer, Ben; Groeseneken, Guido; Wouters, Dirk
Conference
MRS Fall Meeting Symposium D: Materials and Processes for Nonvolatile Memories
Title
Optimization of the ferroelectric film for application in scaled FeFET
Publication type
Oral presentation
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