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The influence of surface fluctuations on early failures in single-damascene Cu wires: a weakest link approximation analysis

dc.contributor.authorWang, Hui
dc.contributor.authorBruynseraede, Christophe
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-15T17:49:51Z
dc.date.available2021-10-15T17:49:51Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9902
dc.sourceIIOimport
dc.titleThe influence of surface fluctuations on early failures in single-damascene Cu wires: a weakest link approximation analysis
dc.typeProceedings paper
dc.contributor.imecauthorMaex, Karen
dc.source.peerreviewno
dc.source.beginpage625
dc.source.endpage626
dc.source.conferenceProceedings IEEE International Reliability Physics Symposium - IRPS
dc.source.conferencedate25/04/2004
dc.source.conferencelocationPhoenix, AZ USA
imec.availabilityPublished - imec


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