The influence of surface fluctuations on early failures in single-damascene Cu wires: a weakest link approximation analysis
dc.contributor.author | Wang, Hui | |
dc.contributor.author | Bruynseraede, Christophe | |
dc.contributor.author | Maex, Karen | |
dc.date.accessioned | 2021-10-15T17:49:51Z | |
dc.date.available | 2021-10-15T17:49:51Z | |
dc.date.issued | 2004 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/9902 | |
dc.source | IIOimport | |
dc.title | The influence of surface fluctuations on early failures in single-damascene Cu wires: a weakest link approximation analysis | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Maex, Karen | |
dc.source.peerreview | no | |
dc.source.beginpage | 625 | |
dc.source.endpage | 626 | |
dc.source.conference | Proceedings IEEE International Reliability Physics Symposium - IRPS | |
dc.source.conferencedate | 25/04/2004 | |
dc.source.conferencelocation | Phoenix, AZ USA | |
imec.availability | Published - imec |
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