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Self-assembled monolayers as model substrates for atomic layer deposition

dc.contributor.authorWhelan, Caroline
dc.contributor.authorDemas, Anne-Cécile
dc.contributor.authorSchuhmacher, Jorg
dc.contributor.authorCarbonell, Laure
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-15T17:53:13Z
dc.date.available2021-10-15T17:53:13Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9912
dc.sourceIIOimport
dc.titleSelf-assembled monolayers as model substrates for atomic layer deposition
dc.typeProceedings paper
dc.contributor.imecauthorMaex, Karen
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage123
dc.source.endpage128
dc.source.conferenceMaterials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics
dc.source.conferencedate12/04/2004
dc.source.conferencelocationSan Fransisco CA USA
imec.availabilityPublished - open access
imec.internalnotesMRS Symposium Proceedings; Vol. 812


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