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In-situ cleaning and passivation of oxidized Cu surfaces by alkanethiols and its application to wire bonding
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Authors
Whelan, Caroline
;
Kinsella, M.
;
Ho, H.M.
;
Maex, Karen
Issue
9
Journal
Journal of Electronic Materials
Volume
33
Title
In-situ cleaning and passivation of oxidized Cu surfaces by alkanethiols and its application to wire bonding
Publication type
Journal article
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