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In-situ cleaning and passivation of oxidized Cu surfaces by alkanethiols and its application to wire bonding

dc.contributor.authorWhelan, Caroline
dc.contributor.authorKinsella, M.
dc.contributor.authorHo, H.M.
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-15T17:53:50Z
dc.date.available2021-10-15T17:53:50Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9914
dc.sourceIIOimport
dc.titleIn-situ cleaning and passivation of oxidized Cu surfaces by alkanethiols and its application to wire bonding
dc.typeJournal article
dc.contributor.imecauthorMaex, Karen
dc.source.peerreviewno
dc.source.beginpage1005
dc.source.journalJournal of Electronic Materials
dc.source.issue9
dc.source.volume33
imec.availabilityPublished - imec


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