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The use of functionally graded poly-SiGe layers for MEMS applications

dc.contributor.authorWitvrouw, Ann
dc.date.accessioned2021-10-15T17:57:33Z
dc.date.available2021-10-15T17:57:33Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9925
dc.sourceIIOimport
dc.titleThe use of functionally graded poly-SiGe layers for MEMS applications
dc.typeOral presentation
dc.source.peerreviewno
dc.source.conferenceFGM - Multifunctional and Functionally Graded Materials
dc.source.conferencedate11/07/2004
dc.source.conferencelocationLeuven Belgium
imec.availabilityPublished - imec
imec.internalnotesKeynote paper


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