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Poly-SiGe, a superb material for MEMS

dc.contributor.authorWitvrouw, Ann
dc.contributor.authorGromova, Maria
dc.contributor.authorMehta, Anshu
dc.contributor.authorSedky, Sherif
dc.contributor.authorDe Moor, Piet
dc.contributor.authorBaert, Kris
dc.contributor.authorVan Hoof, Chris
dc.date.accessioned2021-10-15T17:57:55Z
dc.date.available2021-10-15T17:57:55Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9926
dc.sourceIIOimport
dc.titlePoly-SiGe, a superb material for MEMS
dc.typeProceedings paper
dc.contributor.imecauthorDe Moor, Piet
dc.contributor.imecauthorVan Hoof, Chris
dc.source.peerreviewno
dc.source.beginpage25
dc.source.endpage36
dc.source.conferenceMicro- and Nanosystems
dc.source.conferencedate1/12/2003
dc.source.conferencelocationBoston, MA USA
imec.availabilityPublished - imec
imec.internalnotesMaterials Research Society Symposium Proceedings; Vol. 782


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