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Self-aligned 0-level sealing of MEMS devices by a two layer thin film reflow process

dc.contributor.authorWitvrouw, Ann
dc.contributor.authorRusu, C.
dc.contributor.authorJanssen, Henri
dc.contributor.authorGunn, Robert
dc.date.accessioned2021-10-15T17:58:14Z
dc.date.available2021-10-15T17:58:14Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9927
dc.sourceIIOimport
dc.titleSelf-aligned 0-level sealing of MEMS devices by a two layer thin film reflow process
dc.typeJournal article
dc.source.peerreviewno
dc.source.beginpage364
dc.source.endpage371
dc.source.journalMicrosystem Technologies
dc.source.issue5
dc.source.volume10
imec.availabilityPublished - imec


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