Publication:
Self-aligned 0-level sealing of MEMS devices by a two layer thin film reflow process
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1842 since deposited on 2021-10-15
3last month
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Acq. date: 2026-01-09
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Views
1842 since deposited on 2021-10-15
3last month
2last week
Acq. date: 2026-01-09
Citations