Publication:
Self-aligned 0-level sealing of MEMS devices by a two layer thin film reflow process
Date
| dc.contributor.author | Witvrouw, Ann | |
| dc.contributor.author | Rusu, C. | |
| dc.contributor.author | Janssen, Henri | |
| dc.contributor.author | Gunn, Robert | |
| dc.date.accessioned | 2021-10-15T17:58:14Z | |
| dc.date.available | 2021-10-15T17:58:14Z | |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/9927 | |
| dc.source.beginpage | 364 | |
| dc.source.endpage | 371 | |
| dc.source.issue | 5 | |
| dc.source.journal | Microsystem Technologies | |
| dc.source.volume | 10 | |
| dc.title | Self-aligned 0-level sealing of MEMS devices by a two layer thin film reflow process | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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