Publication:
Self-aligned 0-level sealing of MEMS devices by a two layer thin film reflow process
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1840 since deposited on 2021-10-15
2last month
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Acq. date: 2025-12-15
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Views
1840 since deposited on 2021-10-15
2last month
1last week
Acq. date: 2025-12-15
Citations