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Selection of ferroelectric/high-k gate stack combination for optimized FeFET performance
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Authors
Xu, Zhen
;
Viapiana, Matteo
;
Kaczer, Ben
;
Goux, Ludovic
;
Groeseneken, Guido
;
Wouters, Dirk
Conference
MRS Fall Meeting Symposium D: Materials and Processes for Nonvolatile Memories
Title
Selection of ferroelectric/high-k gate stack combination for optimized FeFET performance
Publication type
Oral presentation
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