Characterization of integrated optical CD for process control

Thumbnail
View/open
Metadata
Show full item record
Authors
Yu, J.; Uchida, J.; Van Dommelen, Y.; Carpaij, R.; Cheng, Shaunee; Pollentier, Ivan; Viswanathan, A.; Lane, L.; Barry, K.; Jakatdar, N.
Conference
Metrology, Inspection, and Process Control for Microlithography XVIII
Title
Characterization of integrated optical CD for process control
Publication type
Proceedings paper
Embargo date
9999-12-31
Collections