Surface and grain boundary scattering studied in beveled polycrystalline thin copper films

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Authors

Zhang, Wenqi; Brongersma, Sywert; Clarysse, Trudo; Terzieva, Valentina; Rosseel, Erik; Vandervorst, Wilfried; Maex, Karen

Issue

4

Journal

Journal of Vacuum Science and Technology B

Volume

22

Title

Surface and grain boundary scattering studied in beveled polycrystalline thin copper films

Publication type

Journal article

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