Precursor Design for Aerosol‐Assisted Plasma Deposition of Poly(Ethylene Oxide)‐Like Thin Films: Deposition Mechanism and Film Properties

Dekoster, Tijs; Van Roy, Wim; Jans, Karolien; Vos, Rita; Nisol, Bernard; Delabie, Annelies

doi:https://doi.org/10.1002/ppap.70032

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